Semiconductor device and method for manufacturing the same

Details Semiconductor device and method for manufacturing the same Semiconductor device and method for manufacturing the same

2007-08-23

2010-12-14

Booth, Richard A. (Department: 2812)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

Insulated gate formation

Reexamination Certificate

active

07851341

ABSTRACT:
A semiconductor device is provided including a transistor element on a substrate, a silicide on a gate and a source/drain of the transistor element; and an amorphous capping layer on the silicide.

REFERENCES:
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patent: 5902129 (1999-05-01), Yoshikawa et al.
patent: 6596643 (2003-07-01), Chen et al.
patent: 6936535 (2005-08-01), Kim et al.
patent: 2006/0079087 (2006-04-01), Kawamura et al.
patent: 2004-299280 (2006-04-01), None

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