Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2006-08-30
2009-02-24
Wilczewski, M. (Department: 2822)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
Reexamination Certificate
active
07495293
ABSTRACT:
A semiconductor device includes a silicon region including Si, and a silicide film provided on the silicon region, the silicide film comprising a compound of Si with Ni, Co, Pd, or Pt and including Er.
REFERENCES:
patent: 5168332 (1992-12-01), Kunishima et al.
patent: 2006/0038229 (2006-02-01), Tsuchiya et al.
patent: 2006/0208320 (2006-09-01), Tsuchiya et al.
patent: 2005-209782 (2005-08-01), None
patent: 2006-060045 (2006-03-01), None
Kittl et al., “Silicides for 65 nm CMOS and Beyond,” Mat. Res. Soc. Symp. Proc. (2003), 765:267-278.
Akutsu Haruko
Iinuma Toshihiko
Suguro Kyoichi
Chhaya Swapneel
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
Wilczewski M.
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