Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...
Reexamination Certificate
2006-11-28
2006-11-28
Jackson, Jerome (Department: 2815)
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Field effect device in non-single crystal, or...
C257S913000, C257SE29299
Reexamination Certificate
active
07141822
ABSTRACT:
The TFT electric characteristic is ready to be influenced by the channel region in the neighborhood of an interface between a semiconductor and a gate insulating film. The present invention provides TFTs reduced in electric characteristic deviations and a method for manufacturing the same. The invention forms a region or layer containing an inactive element, or rear gas element, in the channel region. As shown in FIG.1, a rear gas element is contained at least in an upper layer of the channel region.
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Kajiwara Masayuki
Koezuka Junichi
Kuwabara Hideaki
Nakamura Osamu
Yamazaki Shunpei
Costellia Jeffrey L.
Jackson Jerome
Nixon & Peabody LLP
Semiconductor Energy Laboratory Co,. Ltd.
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