Semiconductor device and method for making the same

Details Semiconductor device and method for making the same Semiconductor device and method for making the same

1992-10-01

1994-05-03

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 61, 437 69, 437 72, 148DIG50, H01L 2176

Patent

active

053087844

ABSTRACT:
There is disclosed in the present invention a method for manufacturing a semiconductor device including an isolation region defined by trenches having different or equal widths respectively on a single semiconductor substrate comprising the steps of:

REFERENCES:
patent: 4799990 (1989-01-01), Kerbaugh et al.
patent: 5004703 (1991-04-01), Zdebel et al.
patent: 5096848 (1992-03-01), Kawamura
patent: 5229315 (1993-07-01), Jun et al.

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