Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2009-11-18
2011-11-29
Luu, Chuong A. (Department: 2892)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S412000, C257S369000, C257S413000
Reexamination Certificate
active
08067791
ABSTRACT:
A semiconductor device formed by the steps of: forming a dummy electrode22nand a dummy electrode22p; forming a metal film32on the dummy electrode22p; conducting a thermal treatment at a first temperature to substitute the dummy electrode22nwith an electrode34aof a material containing the constituent material of the metal film32; forming a metal film36on the dummy electrode22n; and conducting a thermal treatment at a second temperature, which is lower than the first temperature and at which an interdiffusion of constituent materials between the electrode34aand the metal film36does not take place, to substitute the second dummy electrode with an electrode34bof a material containing the constituent material of the metal film36.
REFERENCES:
patent: 6083836 (2000-07-01), Rodder
patent: 6171910 (2001-01-01), Hobbs et al.
patent: 6278164 (2001-08-01), Hieda et al.
patent: 6410376 (2002-06-01), Ng et al.
patent: 6492260 (2002-12-01), Kim et al.
patent: 6583012 (2003-06-01), Buynoski et al.
patent: 6613621 (2003-09-01), Uh et al.
patent: 6645818 (2003-11-01), Sing et al.
patent: 6693315 (2004-02-01), Kuroda et al.
patent: 6908801 (2005-06-01), Saito
patent: 2004/0065930 (2004-04-01), Lin et al.
patent: 2004/0094804 (2004-05-01), Amos et al.
patent: 2005/0136605 (2005-06-01), Murto et al.
patent: 10-125677 (1998-05-01), None
patent: 11-97535 (1999-09-01), None
patent: 11-251595 (1999-09-01), None
patent: 11-261063 (1999-09-01), None
patent: 2001-024187 (2001-01-01), None
patent: 2001-274379 (2001-10-01), None
Murarka S. P., “Silicides for VLSI Applications”, Academic Press, Inc., pp. 88-95, 1983, (see pp. 3 and 44 in the spec.).
Qin M. et al., “Investigation of Polycrystalline Nickel Silicide films as a Gate Material”, Journal of the Electrochemical Society, 148 (5) (The Electrochemical Society, Inc.), pp. G271-F274 (2001) (see pp. 3 and 49 in spec.).
Japanese Office Action mailed Jun. 23, 2008, issued in corresponding Japanese Application No. 2003-00539.
Prior Art Information List associated with Item 3.
Kishii Sadahiro
Kudo Hiroshi
Naganuma Junko
Fujitsu Semiconductor Limited
Luu Chuong A.
Westerman Hattori Daniels & Adrian LLP
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