Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2007-11-20
2007-11-20
Lebentritt, Michael (Department: 2812)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S106000, C438S111000, C438S113000, C438S460000, C438S597000, C438S675000, C438S459000, C438S462000, C257SE21502
Reexamination Certificate
active
11024701
ABSTRACT:
A method for fabricating a semiconductor device including forming a depression in a front surface of a semiconductor substrate, forming an electrode pad within the depression, forming structures including circuit devices and metal wires on the front surface of the semiconductor substrate, and exposing the electrode pad by removing a rear surface of the semiconductor substrate.
REFERENCES:
patent: 6001671 (1999-12-01), Fjelstad
patent: 2004/0080040 (2004-04-01), Dotta et al.
http://www.answers.com/dielectric
Dongbu Electronics Co. Ltd.
Lebentritt Michael
Lee Kyoung
Lowe Hauptman & Ham & Berner, LLP
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