Semiconductor device and manufacturing the same having...

Details Semiconductor device and manufacturing the same having... Semiconductor device and manufacturing the same having...

2006-11-21

2006-11-21

Munson, Gene M. (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S304000

Reexamination Certificate

active

07138676

ABSTRACT:
A semiconductor device in which a plurality of rows are set along an X direction and a plurality of columns are set along a Y direction orthogonal to the X direction, comprises a first element region including a first trench disposed in a first column at one end thereof and a second trench disposed in a second column parallel to the first column at the other end thereof; a second element region including a third trench disposed at a position closer to the second trench than the first trench in the first column at one end thereof and a fourth trench disposed in the second column at the other end thereof; and a third element region including a fifth trench disposed at a position closer to the fourth trench than the third trench in the first column at one end thereof and a sixth trench disposed in the second column at the other end thereof.

REFERENCES:
patent: 5378906 (1995-01-01), Lee
patent: 5559350 (1996-09-01), Ozaki et al.
patent: 5600162 (1997-02-01), R osner
patent: 5747844 (1998-05-01), Aoki et al.
patent: 6172898 (2001-01-01), Kajiyama
patent: 6339239 (2002-01-01), Alsmeier et al.
patent: 6521938 (2003-02-01), Hamamoto
patent: 6831320 (2004-12-01), Beer

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