Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2007-01-16
2007-01-16
Smith, Zandra V. (Department: 2822)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S614000, C438S688000, C438S615000, C438S652000, C257SE21002
Reexamination Certificate
active
11020327
ABSTRACT:
A bonding pad of a semiconductor device and a fabrication method thereof are disclosed. A semiconductor device having a pad formed by exposing a predetermined region of a metal line formed over a semiconductor substrate includes an alloy layer formed on the metal line exposed through the pad. The alloy layer is formed from a reaction between the metal line and a metal having a melting point less than or equal to 1000° C.
REFERENCES:
patent: 5563099 (1996-10-01), Grass
patent: 5571752 (1996-11-01), Chen et al.
patent: 6077775 (2000-06-01), Stumberg et al.
patent: 6239494 (2001-05-01), Besser et al.
patent: 6376353 (2002-04-01), Zhou et al.
patent: 6400026 (2002-06-01), Andou et al.
patent: 6468906 (2002-10-01), Chan et al.
patent: 6551856 (2003-04-01), Lee
patent: 6620721 (2003-09-01), Lee
patent: 6638867 (2003-10-01), Liu et al.
patent: 6710460 (2004-03-01), Morozumi
patent: 2002/0024142 (2002-02-01), Sekiguchi
patent: 2003/0194877 (2003-10-01), Yau et al.
patent: 1020010036333 (2001-05-01), None
Wolf, S. and Tauber, R.N., “Silicon Processing for the VLSI Era”, vol. 1, pp. 559-564, 1986.
Dongbu Electronics Co. Ltd.
Fortnay Andrew D.
Novacek Christy
Smith Zandra V.
LandOfFree
Semiconductor device and fabrication method thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor device and fabrication method thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device and fabrication method thereof will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3795223