Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Field effect transistor
Patent
1998-03-24
2000-06-06
Hardy, David B.
Active solid-state devices (e.g., transistors, solid-state diode
Heterojunction device
Field effect transistor
257 94, 257 96, 257 98, 257280, 257284, 257473, 257486, H01L 310328
Patent
active
060722037
ABSTRACT:
In an HEMT, a channel forming layer is arranged above a semi-insulating substrate via a buffer layer. A spacer layer is arranged on the channel forming layer and an electron supplying layer and a Schottky contact layer are sequentially arranged on the spacer layer. A diffusion preventing layer, for preventing a metal element of a gate electrode from diffusing into the channel forming layer, is arranged in the Schottky contact layer.
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Amano Minoru
Ashizawa Yasuo
Nishikawa Yukie
Noda Takao
Nozaki Chiharu
Bui Huy
Hardy David B.
Kabushiki Kaisha Toshiba
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