Semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Field effect transistor

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257 94, 257 96, 257 98, 257280, 257284, 257473, 257486, H01L 310328

Patent

active

060722037

ABSTRACT:
In an HEMT, a channel forming layer is arranged above a semi-insulating substrate via a buffer layer. A spacer layer is arranged on the channel forming layer and an electron supplying layer and a Schottky contact layer are sequentially arranged on the spacer layer. A diffusion preventing layer, for preventing a metal element of a gate electrode from diffusing into the channel forming layer, is arranged in the Schottky contact layer.

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patent: 5777350 (1998-07-01), Nakamura et al.
patent: 5811843 (1998-09-01), Yamamoto et al.
patent: 5900647 (1999-05-01), Inoguchi

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