Semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S329000, C257S330000, C257SE21537, C257SE21383, C438S212000, C438S268000

Reexamination Certificate

active

08049270

ABSTRACT:
This semiconductor device an epitaxial layer of a first conductivity type formed on a surface of the first semiconductor layer, and a base layer of a second conductivity type formed on a surface of the epitaxial layer. A diffusion layer of a first conductivity type is selectively formed in the base layer, and a trench penetrates the base layer to reach the epitaxial layer. A gate electrode is formed in the trench through the gate insulator film formed on the inner wall of the trench. A first buried diffusion layer of a second conductivity type is formed in the epitaxial layer deeper than the bottom of the gate electrode. A second buried diffusion layer connects the first buried diffusion layer and the base layer and has a resistance higher than that of the first buried diffusion layer.

REFERENCES:
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patent: 6844592 (2005-01-01), Yamaguchi et al.
patent: 7115475 (2006-10-01), Yamaguchi et al.
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patent: 2007/0114599 (2007-05-01), Hshieh
patent: 2001-313393 (2001-11-01), None
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patent: 2006-93457 (2006-04-01), None

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