Semiconductor device

Details Semiconductor device Semiconductor device

2008-06-03

2010-06-08

Lee, Calvin (Department: 2892)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including dielectric isolation means

C438S411000

Reexamination Certificate

active

07732891

ABSTRACT:
A semiconductor device has a substrate, a source region formed on the surface portion of the substrate, a first insulating layer formed on the substrate, a gate electrode formed on the first insulating layer, a second insulating layer formed on the gate electrode, a body section connected with the source region, penetrating through the first insulating layer, the gate electrode and the second insulating layer, and containing a void, a gate insulating film surrounding the body section, and formed between the body section and the gate electrode, and a drain region connected with the body section.

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U.S. Appl. No. 11/962,862, filed Dec. 21, 2007, Hiroyasu Tanaka et al.
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U.S. Appl. No. 12/501,142, filed Jul. 10, 2009, Fukuzumi et al.
U.S. Appl. No. 12/325,023, filed Nov. 28, 2008, Fukuzumi et al.

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