Semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S342000, C257S330000, C438S270000

Reexamination Certificate

active

07663186

ABSTRACT:
A semiconductor device includes: a substrate, a surface portion thereof serving as a drain layer; a first main electrode connected to the drain layer; an epitaxial layer formed on the drain layer; a base layer formed on the epitaxial layer; a source layer formed in a base layer surface portion; an insulated trench sandwiched by base layers; a JFET layer formed on trench side walls; an LDD layer formed in a base layer surface portion and connected to the JFET layer around a top face of the trench; a control electrode formed on a gate insulating film formed on an LDD layer surface part, on surfaces of source layer end parts facing each other across the trench, and on a base layer region sandwiched by the LDD and source layers; and a second main electrode connected to the source and base layers sandwiching the control electrode.

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Shenoy, Praveen M., et al., “Analysis of the Effect of Charge Imbalance on the Static and Dynamic Characteristics of the Super Junction MOSFET”, Industrial Power Product Development, Harris Semiconductor, Mountaintop, PA 18701, IEEE0-7803-5290-4/99, pp. 99-102, 1999.
Fujihara, Tatsuhiko, “Theory of Semiconductor Superjunction Devices”, Jpn. J. Appl. Phys. vol. 36 (1997), pp. 6254-6262, Part I, No. 10, Oct. 1997.

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