Semiconductor device

Details Semiconductor device Semiconductor device

2005-09-22

2008-10-07

Rose, Kiesha L (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S307000

Reexamination Certificate

active

07432545

ABSTRACT:
A capacity element with a simple configuration exhibits excellent production reliability. A semiconductor device100includes a capacity element consisting of a lower electrode102,an SiCN film107and an upper electrode113.In an insulating film101on a semiconductor substrate is formed a groove, in which the lower electrode102is buried. The lower electrode102includes two regions, that is, a first lower electrode103and a second lower electrode105,which are separated from each other via the insulating film101.

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