Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1997-07-21
2000-03-21
Fahmy, Wael
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257740, 257758, 257774, H01L 2144
Patent
active
060406046
ABSTRACT:
A semiconductor component (10) includes a substrate (11), doped regions (15, 20) in the substrate (11), interconnect layers (23, 26, 29) coupled to one of the doped layers, and dielectric layers (21, 24, 27) between the interconnect layers (23, 26, 29) wherein a portion (48) of the top interconnect layer (29) overlies portions (47, 42, 43) of the underlying interconnect layers (23, 26) and wherein a portion (47) of the middle interconnect layer (26) does not overlie the portions (42, 43) of the bottom interconnect layer (23) and also does not overlie portions (32, 33) of one of the doped regions (20).
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Stanley Wolf, "Silicon Processing for the VLSI Era" vol. 2: Process Integration, 1990, pp. 441-446.
Lauvray Olivier J.
Rodriguez David
Dover Rennie William
Eaton Kurt
Fahmy Wael
Motorola Inc.
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