Semiconductor accelerometer including strain gauges forming a wh

Details Semiconductor accelerometer including strain gauges forming a wh Semiconductor accelerometer including strain gauges forming a wh

1996-05-22

1998-10-27

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73 138, G01P 1512

Patent

active

058279679

ABSTRACT:
A semiconductor accelerometer having a sensor element which includes a support frame, a silicon mass, flexures connected to the support frame and the silicon mass, semiconductor strain gauges formed on the flexures, and a staggered arrangement of diffusion resistors for adjusting any offset value variation. Aluminum wiring is connected to the strain gauges to form a Wheatstone bridge circuit, and a housing is provided to cover the sensor element.

REFERENCES:
patent: 4553436 (1985-11-01), Hansson
patent: 4633099 (1986-12-01), Tanabe
patent: 4641539 (1987-02-01), Vilimek
patent: 4848157 (1989-07-01), Kobayashi
patent: 5103667 (1992-04-01), Allen et al.
patent: 5251485 (1993-10-01), Kondo

Affiliated with

Also associated with

Rating

Semiconductor accelerometer including strain gauges forming a wh does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor accelerometer including strain gauges forming a wh, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor accelerometer including strain gauges forming a wh will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1614665