Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Patent
1995-08-23
1999-12-21
Mintel, William
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
257418, 257419, 257420, 257619, 7351421, 7351422, 7351423, 7351436, 7351437, 73DIG1, H01L 2982
Patent
active
060052759
ABSTRACT:
A semiconductor device comprises a semiconductor acceleration sensor having a cantilever made of a semiconductor material, a supporter for supporting the cantilever, and diffused resistors disposed on the cantilever. An acceleration detecting device detects a displacement of the cantilever based on acceleration forces applied to the cantilever and on changes of resistance values of the diffused resistors.
REFERENCES:
patent: 3304787 (1967-02-01), Chiku et al.
patent: 4025942 (1977-05-01), Kurtz
patent: 4141253 (1979-02-01), Whitehead, Jr.
patent: 4494409 (1985-01-01), Kondo et al.
patent: 4881408 (1989-11-01), Hulsing, II et al.
patent: 4963954 (1990-10-01), Hale et al.
patent: 4969359 (1990-11-01), Mikkor
patent: 5060504 (1991-10-01), White et al.
patent: 5101669 (1992-04-01), Holm-Kennedy et al.
patent: 5151763 (1992-09-01), Marek et al.
patent: 5202281 (1993-04-01), Ishibashi
patent: 5313836 (1994-05-01), Fujii et al.
patent: 5536963 (1996-07-01), Polla
No Author, "Double Cantilever Sensor for Thin-Film Hardness Testing and Mass Storage Application", IBM Technical Disclosure Bulletin, vol. 34, No. 10A, Mar. 1992, pp. 194-195.
IEEE Ultrasonic Symposium, Oct. 31, 1993, pp. 341-350, Najafi et al., "Solid-State Microsensors and Smart Structures".
Harada Hirofumi
Katoh Kenji
Saitoh Yutaka
Shinogi Masataka
Yoshida Yoshifumi
Mintel William
Seiko Instruments Inc.
LandOfFree
Semiconductor acceleration sensor with cantilever does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor acceleration sensor with cantilever, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor acceleration sensor with cantilever will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-507678