Semiconductor acceleration sensor and testing method thereof

Details Semiconductor acceleration sensor and testing method thereof Semiconductor acceleration sensor and testing method thereof

1995-10-23

1998-06-02

Chapman, John E.

Measuring and testing

Instrument proving or calibrating

Speed, velocity, or acceleration

73 138, 7351433, G01P 2100

Patent

active

057602905

ABSTRACT:
A semiconductor acceleration sensor has a silicon detecting body and a glass substrate. The silicon detecting body has a weight, a supporting frame, and beams for coupling the weight to the supporting frame, which are integrally processed from a silicon wafer. At least one semiconductor strain gauge is formed on a surface of a beam. The glass substrate is electrostatically joined with the supporting frame of the silicon detecting body. Furthermore, a gap portion is formed between a surface of the glass substrate and a lower surface of the weight.

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