Semiconductor acceleration sensor and manufacturing method there

Details Semiconductor acceleration sensor and manufacturing method there Semiconductor acceleration sensor and manufacturing method there

1999-03-16

2000-11-28

Monin, Jr., Donald L.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

216 2, 73517, 360280, H01L 21283

Patent

active

061539171

ABSTRACT:
A semiconductor acceleration sensor including a central board having a movable electrode section, an outside board having a stationary electrode section, and a sealing insulating section for joining the central board and the outside board which are laminated on each other, wherein the sealing insulating section has a conductive layer, and the conductive layer is a sealing member or an anodic bonding electrode.

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patent: 5095750 (1992-03-01), Suzuki et al.
patent: 5343064 (1994-08-01), Spangler et al.
patent: 5367429 (1994-11-01), Tsuchitani et al.
patent: 5392651 (1995-02-01), Suzuki et al.
patent: 5616844 (1997-04-01), Suzuki et al.
patent: 5676851 (1997-10-01), Suzuki et al.

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