Semiconductor acceleration sensor

Details Semiconductor acceleration sensor Semiconductor acceleration sensor

1997-02-27

1999-03-30

Saadat, Mahshid D.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

257415, 257418, 438 52, H01L 2982

Patent

active

058893113

ABSTRACT:
A semiconductor device comprises a semiconductor acceleration sensor having a cuboid-shaped cantilever cut from a semiconductor wafer, a detecting device disposed on the cantilever for detecting a displacement of the cantilever due to an acceleration force applied to the cantilever, and a supporter for supporting and fixing the cantilever at one end thereof.

REFERENCES:
patent: 5231879 (1993-08-01), Yamamoto
patent: 5243861 (1993-09-01), Kloeck et al.
patent: 5260596 (1993-11-01), Dunn et al.
patent: 5408112 (1995-04-01), Tai et al.
patent: 5539236 (1996-07-01), Kurtz et al.

Affiliated with

Also associated with

Rating

Semiconductor acceleration sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor acceleration sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor acceleration sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1217152