Semiconductor acceleration sensor

Details Semiconductor acceleration sensor Semiconductor acceleration sensor

1991-02-15

1992-10-20

James, Andrew J.

357 27, 73777, 73778, H01L 2984, H01L 2722, G01B 1120, G01L 100

Patent

active

051574721

ABSTRACT:
A semiconductor acceleration sensor and a method of producing the sensor are characterized in that a pedestal on which a semiconductor acceleration sensor chip including a weight is mounted is integral with a stopper for preventing movement of the weight outside a prescribed range. The semiconductor acceleration sensor is not broken even if an acceleration outside the measurement range is applied. In addition, the semiconductor acceleration sensor exhibits high accuracy and is low in cost.

REFERENCES:
Nass, "Tiny Accelerometer IC Reaches High Sensitivity", Electronic Design, Sep. 1988.

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