Semi-conductor acceleration sensor having thin beam supported we

Details Semi-conductor acceleration sensor having thin beam supported we Semi-conductor acceleration sensor having thin beam supported we

1995-01-23

1996-02-13

Raevis, R.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351429, 338 2, G01P 1512

Patent

active

054904218

ABSTRACT:
The semiconductor acceleration sensor comprises a thick weight 100 made of a semiconductor, a thick support member 120 surrounding the weight, and first and second sets of paired thin beams which connect the weight with the support member. The first and second sets consist of paired beams 111 and 113, and a pair of beams 112 and 114, respectively. In each of the beam sets, the two beams are positioned so that, when one of them is rotated by 180 degree about the center of the weight, this beam coincides with the other beam. On the upper faces of the beams, for example, on the upper faces in the side of connecting the beams with the support member, strain gauges 131, 133, 135 and 137 of a first type are formed in the longitudinal direction of the respective beam, and strain gauges 132, 134, 136 and 138 of a second type are formed in the width direction. Thereby it is possible to reduce the level of an interference output, and improve an impact resistance.

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Copy of British Office Action re corresponding UK application No. 9306077.0.
British Search Report dated 21 Jun. 1993.

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