SEM sample holder apparatus for implementing enhanced...

Details SEM sample holder apparatus for implementing enhanced... SEM sample holder apparatus for implementing enhanced...

2005-03-29

2005-03-29

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S442110

Reexamination Certificate

active

06872955

ABSTRACT:
A method and a scanning electron microscope (SEM) holder apparatus are provided for implementing examination of multiple samples. The SEM holder apparatus includes a metal plate. The metal plate includes a plurality of through holes arranged in a predefined pattern, a mounting opening, and an O-ring receiving recess extending within the metal plate to the plurality of through holes. The SEM holder apparatus includes a plurality of sample holders, each inserted within a selected one of the plurality of through holes. An O-ring is inserted within the O-ring receiving recess to provide a secure mounting of the plurality of sample holders. The O-ring protrudes partially into the through holes receiving the sample holders, providing positive holding pressure that ensures a secure mounting of the sample holders to provide electrical conductivity and vibration suppression.

REFERENCES:
patent: 4745297 (1988-05-01), Sullivan et al.
patent: 20030032067 (2003-02-01), Hefti

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