SEM profile and surface reconstruction using multiple data sets

Details SEM profile and surface reconstruction using multiple data sets SEM profile and surface reconstruction using multiple data sets

2005-08-16

2005-08-16

Wells, Nikita (Department: 2883)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000

Reexamination Certificate

active

06930308

ABSTRACT:
A highly accurate technique for inspecting semiconductor devices is described. The technique involves utilizing multiple sets of measurement data obtained by a scanning electron microscope (SEM) to determine the dimensional parameters of a semiconductor device. The SEM collects each set of data from a different angular orientation with respect to the device. The dimensional parameters of the semiconductor device are determined by analyzing the relationship between the SEM inspection angle and the collected data sets. Various configurations of an SEM can be used to implement this invention. For instance an electron beam inspection system of the present invention can have at least two sets of deflectors for guiding the electron beam, a swiveling specimen stage, and/or a set of detectors set about the specimen at different angular orientations.

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