Self-diagnostic circuit of I/O circuit system

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design

Reexamination Certificate

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Details

C716S030000

Reexamination Certificate

active

06986111

ABSTRACT:
An I/O circuit system incorporated in the main controller of a semiconductor manufacturing apparatus or the like includes a self-diagnostic circuit in which tie switches are interposed between output channels which output control signals in order to drive and control apparatus-side driving portions constructed on an I/O board, and input channels which input return signals and sensor signals in response to the control signals, and self-diagnostic switches which disconnect power supply lines to the apparatus-side driving portions are arranged. To perform self-diagnosis upon generation of a fault or the like, the self-diagnostic switches are in a nonconductive state, and the tie switches are in a conductive state to electrically disconnect the apparatus. If a return signal corresponding to a self-diagnostic signal output from the main controller is returned, no electrical fault is determined to occur. If no return signal is returned, an electrical fault is determined to have occurred.

REFERENCES:
patent: 5450330 (1995-09-01), Zapisek
patent: 5828577 (1998-10-01), Ehlig
patent: 6286127 (2001-09-01), King et al.
patent: 6622286 (2003-09-01), Ngo et al.
patent: 2-244855 (1990-09-01), None
patent: 5-316216 (1993-11-01), None
patent: 8-194528 (1996-07-01), None
patent: 10-124408 (1998-05-01), None
patent: 11-143790 (1999-05-01), None

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