Self-calibrating temperature probe

Details Self-calibrating temperature probe Self-calibrating temperature probe

1996-04-08

1999-08-17

Dombroske, George

Thermal measuring and testing

Temperature measurement

In spaced noncontact relationship to specimen

G01J 500

Patent

active

059383356

ABSTRACT:
A probe for measuring the temperature of a substrate in a substrate processing chamber. The probe includes a light pipe, one end of which is inserted into the processing chamber. The other end of the light pipe is connected to a bifurcated optical fiber. A light source is optically coupled to one branch of the optical fiber, and a pyrometer is optically coupled to another branch. To self-calibrate the probe, an object of stable reflectivity, e.g., a gold-plated wafer, is inserted into the chamber, the light source is activated, and the intensity of light reflected from the object is measured by the pyrometer.

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