Radiant energy – Ion generation – Field ionization type
Reexamination Certificate
2008-09-23
2010-11-16
Wells, Nikita (Department: 2881)
Radiant energy
Ion generation
Field ionization type
C250S424000, C250S427000, C250S492300, C118S7230CB, C315S111010, C361S235000
Reexamination Certificate
active
07834327
ABSTRACT:
A load circuit device having a self-biasing active load circuit, and a related high voltage power supply configured to bias an optical element in a charged particle beam processing system, such as a gas cluster ion beam (GCIB) processing system. The high voltage power supply comprises a variable voltage supply having a load terminal at a load potential and a reference terminal at a reference potential, and a self-biasing active load circuit connected between the load terminal and the reference terminal, and configured to sustain a variable voltage drop between the load potential and the reference potential while maintaining a substantially constant current.
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TEL Epion Inc.
Wells Nikita
Wood Herron & Evans LLP
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