Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2005-07-27
2010-02-16
Luu, Chuong A (Department: 2892)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C257S738000, C438S108000
Reexamination Certificate
active
07662708
ABSTRACT:
A method of forming a self-assembled interconnect structure is described. In the method, a contact pad surface and particles in a solution are brought together. The particles are selected such that they the particles adhere to the contact pad surface. Formation of a contact is completed by pressing an opposite contact into the particles such that an electrical connection is formed via the particles between the opposite contact pad and the substrate surface contact pad. The described self-assembled interconnect structure is particularly useful in display device fabrication.
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Collman, et al: “Clicking” Functionality Onto Electrode Surfaces, American Chemical Society, Department Of Chemistry, Stanford University, Dec. 5, 2003.
Tien, et al: Microfabrication Through Electrostatic Self-Assembly, American Chemical Society, May 2, 1997, Langmuir, vol. 13, No. 20, pp. 5349-5355.
Groenendaal, et al: Poly(3,4-Ethylenedioxythiophene) And Its Derivatives: Past, Present, And Future, Advanced Materials.
Cook, et al: Self-Assembled Circuit Patterns, Computer Science And Computation And Neural Systems, California Institute Of Technology.
Gregory, et al: Chameleon Fibers: Dynamic Color Change From Tunable Molecular And Oligomeric Devices, National Textile Center Research Briefs—Materials Competency, Jun. 2001, pp. 6-7.
Hanks, et al: Conducting Polymers As Substrates For Surface-Mounted Molecular Devices, Department Of Chemistry, Furman University.
Nishida, et al: Micropitch Connection Using Anisotropic Conductive Materials For Driver IC Attachment To A Liquid Crystal Display, IBM Journal Of Research And Development, Mar. 1997, vol. 42.
Chah, et al: Nanostructured Gold Hollow Microspheres Prepared On Dissolvable Ceramic Holly Sphere Templates, Journal Of Colloid And Interface Science 250, 2002, pp. 142-148, Http://www.idealibrary.com.
Noel, et al: Self-Assembled Monolayers Of Alcanethiols On Nickel Surfaces For Low Level Electrical Contact Applications, IEEE, 1997, pp. 212-218.
Xia, et al: Template-Assisted Self-Assembly Of Spherical Colloids Into Complex And Controllable Structures, Advanced Functional Materials, 2003, vol. 13, No. 12, December, pp. 907-918.
Clark, et al: Self-Assembly Of 10-μm-Sized Objects into Ordered Three-Dimensional Arrays, J. American Chemical Society, 2001, vol. 123, No. 31, pp. 7677-7682.
Zheng, et al: Two Component Particle Arrays On Patterned Polyelectrolyte Multilayer Templates, Advanced Materials, Apr. 18, 2002, vol. 14, No. 8, pp. 569-572.
Lee, et al: Controlled Cluster Size in Patterned Particle Arrays Via Directed Adsorption On Confined Surfaces, Advanced Materials, Apr. 18, 2002, vol. 14, No. 8, pp. 572-577.
Kim, et al: Polarized Light Scattering By Dielectric And Metallic Spheres On Silicon Wafers, Optical Society Of America, Applied Optics, Sep. 1, 2002, vol. 41, No. 25, pp. 5405-5412.
Lee, et al: Selective Electroless Nickel Plating Of Particle Arrays On Polyelectrolyte Multilayers, American Chemical Society, Chem. Mater. 2003, vol. 15, No. 24, pp. 4583-4589.
Opdahl, Peter: Anisotropic Conductive Film For Flipchip Applications: An Introduction, Flipchip Dot Com, Tutorial 5, Ito America Corporation/ Sony Chemicals Corporation, www.itousa.com.
Author Unknown: Patterning Self-Assemblies Into Usable Structures—2D and 3D Colloidal Crystals Presentation, Retrieved From The Worldwide Web, Site And Date Of Publication Unknown.
Kim, Jung Hyeun, Ehrman, Sheryl, Mulholland, George, Germer, Thomas, Polarized Light Scattering By Dielectric And Metallic Spheres On Silicon Wafers, Optical Society of America, Sep. 1, 2002, pp. 5405-5412, Vol. 41, No. 25, Applied Optics.
Lee, Ilsoon, Hammond, Paul, Rubner, Michael, Selective Electroless, Nickel Plating Of Particle Arrays On Polyelectrolyte Multilayers, 2003 American Chemical Society, Chemical Materials 2003, pp. 4583-4589. vol. 15, No. 24.
Clark, Thomas, Tien, Joe, Duffy, David Paul, Kateri, Whitsides, Georg
Chabinyc Michael L.
Fork David K.
Hantschel Thomas
Arora Ajay K.
Luu Chuong A
Palo Alto Research Center Incorporated
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