Self-alignment technique for forming junction isolation and well

Details Self-alignment technique for forming junction isolation and well Self-alignment technique for forming junction isolation and well

1995-04-25

1996-09-17

Fourson, George

Fishing, trapping, and vermin destroying

437 27, 437 59, 437 69, 437 75, 437148, 437984, 148DIG9, 257370, H01L 21265

Patent

active

055567967

ABSTRACT:
A method in accordance with one embodiment of the present invention may be used to self-align isolation regions, sinkers, and wells. In this improved method, P+ isolation regions, N+ sinkers, and P-wells are defined using the same masking step used to define the N-wells. The use of a single masking step to initially define the P+ isolation regions, N+ sinkers, N-wells, and P-wells results in the self-alignment of these regions. Several critical mask alignments are thereby eliminated, thus avoiding/simplifying fabrication steps, conserving die area, and allowing increased component density.

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patent: 4724221 (1988-02-01), Jochems
patent: 4734382 (1988-03-01), Krishna
patent: 5254486 (1993-10-01), Alter

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