Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Coating selected area
Reexamination Certificate
2004-09-21
2008-11-11
Bell, Bruce F (Department: 1795)
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Coating selected area
C205S080000, C205S096000, C205S123000, C205S157000, C205S298000, C438S618000, C438S620000, C438S669000, C438S672000, C438S685000, C438S686000, C438S687000, C427S123000, C427S124000, C427S125000, C427S435000, C427S436000, C427S443100, C427S443200
Reexamination Certificate
active
07449099
ABSTRACT:
To make a metal feature, a non-plateable layer is applied to a workpiece surface and then patterned to form a first plating region and a first non-plating region. Then, metal is deposited on the workpiece to form a raised field region in said first plating region and a recessed region in said first non-plating region. Then, an accelerator film is applied globally on the workpiece. A portion of the accelerator film is selectively removed from the field region, and another portion of the accelerator film remains in the recessed acceleration region. Then, metal is deposited onto the workpiece, and the metal deposits at an accelerated rate in the acceleration region, resulting in a greater thickness of metal in the acceleration region compared to metal in the non-activated field region. Then, metal is completely removed from the field region, thereby forming the metal feature.
REFERENCES:
patent: 4564424 (1986-01-01), Cassat et al.
patent: 5017503 (1991-05-01), Shiba
patent: 5665200 (1997-09-01), Fujimoto et al.
patent: 6440781 (2002-08-01), Coppock et al.
patent: 6534116 (2003-03-01), Basol
patent: 6684499 (2004-02-01), Romano et al.
patent: 6693003 (2004-02-01), Okuda
patent: 6863795 (2005-03-01), Teerlinck
patent: 6867136 (2005-03-01), Basol
patent: 6943112 (2005-09-01), Basol et al.
patent: 7097755 (2006-08-01), Basol et al.
patent: 2001/0032787 (2001-10-01), Uzoh et al.
patent: 2003/0063403 (2003-04-01), Nishikawa et al.
patent: 2005/0092611 (2005-05-01), Kim et al.
Osterwald et al., “Wirkung von Badzusätzen bei der kathodischen Metallabscheidung”, Galvanotechnik, 66, Nr. 5, pp. 360-365 (1975), Leuze Verlag, Saulgau, Germany.
Drewery John Stephen
Mayer Steven T.
Bell Bruce F
Novellus Systems Inc.
Swenson Thomas
LandOfFree
Selectively accelerated plating of metal features does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Selectively accelerated plating of metal features, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Selectively accelerated plating of metal features will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4028997