Selective modification of individual nanometer and subnamometer

Details Selective modification of individual nanometer and subnamometer Selective modification of individual nanometer and subnamometer

1992-06-04

1994-08-30

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

2504923, 369126, H01J 3700

Patent

active

053430425

ABSTRACT:
A process for the selective modification and reversible removal of extremely fine structures having dimensions of down to the nanometer and subnanometer range from the surface of a solid, comprises moving the fine tip of a probe, for example a surface-sensitive scanning probe, which is located at a distance in the .ANG.ngstrom range above the surface or is in contact with the surface, over the structure at essentially the same height and thus causing a change in this structure.

REFERENCES:
patent: 4878213 (1989-10-01), Kazan et al.
patent: 4916688 (1990-04-01), Foster et al.
patent: 4987312 (1991-01-01), Eigler
patent: 5015323 (1991-05-01), Gallagher
patent: 5138174 (1992-08-01), Tang
patent: 5144148 (1992-09-01), Eigler
patent: 5144581 (1992-09-01), Toda et al.
patent: 5262981 (1993-11-01), Rabe et al.

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