Selective etching of phosphosilicate glass

Details Selective etching of phosphosilicate glass Selective etching of phosphosilicate glass

1982-05-11

1983-07-26

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156653, 156663, 252 793, 252 794, B44C 122, C03C 1500, C03C 2506

Patent

active

043953042

ABSTRACT:
A selective chemical etchant solution for phosphosilicate glass includes a carboxylic acid, hydrogen fluoride and water. The invention is also a method for preferentially etching the phosphosilicate glass which comprises the step of immersing the glasses in the etchant solution of the invention.

REFERENCES:
patent: 3481781 (1969-12-01), Kern
patent: 3977925 (1976-08-01), Schwabe
patent: 4171242 (1979-10-01), Liu
patent: 4273805 (1981-06-01), Dawson et al.
W. Kern, "Analysis of Glass Passivation Layers on Integrated-Circuit Pellets by Precision Etching", RCA Review, vol. 37, 3/76.

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