Selective epitaxy vertical integrated circuit components

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C257S329000, C257SE29252, C257SE27086

Reexamination Certificate

active

07372091

ABSTRACT:
Integrated circuit components are described that are formed using selective epitaxy such that the integrated circuit components, such as transistors, are vertically oriented. These structures have regions that are doped in situ during selective epitaxial growth of the component body. These components are grown directly in electrical communication lines. Moreover, these components are adapted for use in memory devices and are believed to not require the use of shallow trench isolation.

REFERENCES:
patent: 4759821 (1988-07-01), Knoedler et al.
patent: 4847670 (1989-07-01), Monkowski et al.
patent: 4957875 (1990-09-01), Akbar et al.
patent: 4982257 (1991-01-01), Akbar et al.
patent: 5059544 (1991-10-01), Burghartz et al.
patent: 5064772 (1991-11-01), Jambotkar
patent: 5101256 (1992-03-01), Harame et al.
patent: 5128271 (1992-07-01), Bronner et al.
patent: 5137840 (1992-08-01), Desilets et al.
patent: 5235206 (1993-08-01), Desilets et al.
patent: 5244824 (1993-09-01), Sivan
patent: 5312782 (1994-05-01), Miyazawa
patent: 5321285 (1994-06-01), Lee et al.
patent: 5331199 (1994-07-01), Chu et al.
patent: 5446312 (1995-08-01), Hsieh et al.
patent: 5451538 (1995-09-01), Fitch et al.
patent: 5521399 (1996-05-01), Chu et al.
patent: 5547893 (1996-08-01), Sung
patent: 5581101 (1996-12-01), Ning et al.
patent: 5583059 (1996-12-01), Burghartz
patent: 5583368 (1996-12-01), Kenney
patent: 5637518 (1997-06-01), Prall et al.
patent: 5677573 (1997-10-01), Prall et al.
patent: 5723370 (1998-03-01), Ning et al.
patent: 5831334 (1998-11-01), Prall et al.
patent: 5963800 (1999-10-01), Augusto
patent: 5998844 (1999-12-01), Prall et al.
patent: 6027975 (2000-02-01), Hergenrother et al.
patent: 6057200 (2000-05-01), Prall et al.
patent: 6127242 (2000-10-01), Batra et al.
patent: 6157058 (2000-12-01), Ogura
patent: 6159852 (2000-12-01), Nuttall et al.
patent: 6168995 (2001-01-01), Kelley et al.
patent: 6197641 (2001-03-01), Hergenrother et al.
patent: 6251693 (2001-06-01), Nuttall et al.
patent: 6261894 (2001-07-01), Mandelman et al.
patent: 6303425 (2001-10-01), Maeda et al.
patent: 6309919 (2001-10-01), Liu et al.
patent: 6316309 (2001-11-01), Holmes et al.
patent: 6326275 (2001-12-01), Harrington et al.
patent: 6335239 (2002-01-01), Agahi et al.
patent: 6387716 (2002-05-01), Nuttall et al.
patent: 6391695 (2002-05-01), Yu et al.
patent: 6391782 (2002-05-01), Yu et al.
patent: 6399979 (2002-06-01), Noble et al.
patent: 6417015 (2002-07-01), Nuttall et al.
patent: 6458699 (2002-10-01), Nuttall et al.
patent: 6509239 (2003-01-01), Nuttall et al.
patent: 6518622 (2003-02-01), Chew et al.
patent: 6630699 (2003-10-01), Wylie
patent: 6635924 (2003-10-01), Hergenrother et al.
patent: 6653181 (2003-11-01), Hergenrother et al.
patent: 6656809 (2003-12-01), Greenberg et al.
patent: 6687146 (2004-02-01), Kurjanowicz et al.
patent: 6790722 (2004-09-01), Divakaruni et al.
patent: 6794699 (2004-09-01), Bissey et al.
patent: 6803642 (2004-10-01), Freeman et al.
patent: 6812504 (2004-11-01), Bhattacharyya
patent: 6812533 (2004-11-01), Cai et al.
patent: 6812545 (2004-11-01), Dunn et al.
patent: 6849871 (2005-02-01), Ning
patent: 6864517 (2005-03-01), Freeman
patent: 6864560 (2005-03-01), Khater et al.
patent: 6888221 (2005-05-01), Joseph et al.
patent: 2002/0089038 (2002-07-01), Ning
patent: 2002/0131291 (2002-09-01), Kurjanowicz et al.
patent: 2002/0171107 (2002-11-01), Cheng et al.
patent: 2003/0042531 (2003-03-01), Lee et al.
patent: 2003/0057477 (2003-03-01), Hergenrother et al.
patent: 2004/0119136 (2004-06-01), Cai et al.
patent: 2004/0152269 (2004-08-01), Hergenrother et al.
patent: 2005/0087805 (2005-04-01), Ning
patent: 2006/0006444 (2006-01-01), Leslie
Geppert, Linda , “The Amazing Vanishing Transistor Act”,IEEE Spectrum, (Oct. 2002), 7 pages.
Deffree, Susan , “IBM proves vertical transistor DRAM at 70nm”,Electronic News, (Jun. 10, 2003),2 pgs.
Hergenrother, J M., et al., “The vertical replacement-gate (VRG) MOSFET: a 50-nm vertical MOSFET with lithography-independent gate length”,Bell Laboratories, Lucent Technologies, Murray Hill, 4pgs.
ISA, “IBM claims speediest silicon transistor”, http://www.isa.org/Template.cfm?Section=Communities&template=/TaggedPage/DetailDisplay.cfm&ContentID=20445, ISA—The Instrumentation, Systems and Automation Society,(Nov. 4, 2002),2 pgs.
Lucent Technologies, “Revolutionary transistor design turns the silicon world on end”, http://www.bell-labs.com
ews/1999
ovember/15/1.html, Lucent Technologies, Bell Labs Innovations,(1999),3 pgs.
Lucent Technologies, “Revolutionary transistor turns silicon world on end”, (2000),2 pgs.
Ning, T H., “Why BiCMOS and SOI BiCMoS?”,IBM, 0018-8646,(Nov. 29, 2001),7 pgs.
Geppert, Linda , “Triple Gate Double Play: Transistors with three gates and 3-D geometries will replace today's devices in a few years”,IEEE Spectrum, (Nov. 2002),18.
“Non-Final Office Action mailed Aug. 20, 2007 in U.S. Appl. No. 11/168,855”, 12 pgs.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Selective epitaxy vertical integrated circuit components does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Selective epitaxy vertical integrated circuit components, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Selective epitaxy vertical integrated circuit components will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3981949

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.