Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Electrical signal parameter measurement system
Reexamination Certificate
2007-05-08
2007-05-08
Hoff, Marc S. (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Electrical signal parameter measurement system
C702S159000, C702S172000, C438S016000
Reexamination Certificate
active
10162516
ABSTRACT:
Specific wavelengths to use in optical metrology of an integrated circuit can be selected using one or more selection criteria and termination criteria. Wavelengths are selected using the selection criteria, and the selection of wavelengths is iterated until the termination criteria are met.
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Bao Junwei
Barry Kelly
Doddi Srinivas
Drege Emmanuel
Jakatdar Nickhil
Baran Mary Catherine
Hoff Marc S.
Timbre Technologies, Inc.
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