Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Reexamination Certificate
2008-07-08
2008-07-08
Huff, Mark F. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
C430S322000, C430S394000, C430S330000
Reexamination Certificate
active
07396636
ABSTRACT:
A method for creating segmented resist islands for photolithography on single sliders is disclosed. The method includes ramping the temperature of a number of single sliders, to a temperature that is below a proper softbake temperature. The single sliders reside in a divider and the single sliders and walls of the divider have a layer of resist deposited on them. Coarse lithography is then performed to remove the resist from above portions of the walls of the divider; and the temperature of the single sliders, the resist and the divider is then ramped to a proper softbake temperature.
REFERENCES:
patent: 2002/0094492 (2002-07-01), Randall et al.
patent: 2004/0250414 (2004-12-01), Lelong
patent: 2004/0265531 (2004-12-01), McKean et al.
patent: 2005/0164134 (2005-07-01), Shirley et al.
patent: 2166888 (1986-05-01), None
Hwang Cherngye
Lee Kim Y.
McKean Dennis R.
Suzuki Gary
Hitachi Global Storage Technologies - Netherlands B.V.
Huff Mark F.
Sullivan Caleen O
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