Electric heating – Metal heating – By arc
Patent
1995-07-27
1998-03-24
Paschall, Mark H.
Electric heating
Metal heating
By arc
21912152, 21912143, 156345, 31511151, B23K 1000, H01L 21100
Patent
active
057315655
ABSTRACT:
A segmented transformer coupled plasma (TCP) coil is provided as a source for generating a uniform plasma in a plasma reactor. The segmented TCP is divided into two or more segment coils which, when connected to an RF source, produces a circulating flow of electrons to cause a magnetic field in the plasma. Because the segmented TCP employs multiple segment coils, a plasma is generated that is more spatially uniform than the plasma produced by a monolithic coil. This is implemented using a power distributing component that allows the RF current to be distributed in the segment coils such that a uniform plasma density can be obtained in an area spanned by the coils. For instance, variable shunts, switchable shunts, and disconnect switches can be used to vary the RF currents in the individual coils.
REFERENCES:
patent: 4615755 (1986-10-01), Tracy et al.
patent: 4948458 (1990-08-01), Ogle
patent: 5198718 (1993-03-01), Davis et al.
patent: 5261962 (1993-11-01), Hamamoto et al.
patent: 5304279 (1994-04-01), Coultas et al.
patent: 5401350 (1995-03-01), Patrick et al.
patent: 5433812 (1995-07-01), Cuomo et al.
Lam Research Corporation
Paschall Mark H.
LandOfFree
Segmented coil for generating plasma in plasma processing equipm does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Segmented coil for generating plasma in plasma processing equipm, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Segmented coil for generating plasma in plasma processing equipm will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2290632