Seesaw-type MEMS switch and method for manufacturing the same

Details Seesaw-type MEMS switch and method for manufacturing the same Seesaw-type MEMS switch and method for manufacturing the same

2006-05-23

2006-05-23

Takaoka, Dean (Department: 2817)

Wave transmission lines and networks

Plural channel systems

Having branched circuits

C333S262000

Reexamination Certificate

active

07049904

ABSTRACT:
In a seesaw-type MEMS switch for radio frequency (RF) and a method for manufacturing the same, the seesaw-type MEMS switch for radio frequency (RF) includes a substrate, a transmission line formed on the substrate having a gap therein to provide a circuit open condition, an intermittent part formed a predetermined distance from the substrate, the intermittent part being operable to contact the transmission line on both sides of the gap by performing a seesaw movement about a seesaw movement axis, and a driving part to drive the seesaw movement of the intermittent part in response to a driving signal.

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