Seek-scan probe (SSP) memory including mechanism for track...

Details Seek-scan probe (SSP) memory including mechanism for track... Seek-scan probe (SSP) memory including mechanism for track...

2007-03-30

2009-06-16

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Reexamination Certificate

active

07547883

ABSTRACT:
An apparatus comprising a substrate having one or more anchors formed thereon; a movable platform suspended by one or more tether beams from the one or more anchors; an actuator coupled to the movable platform; and a micro-electro-mechanical (MEMS) probe having a proximal end, a distal end and a longitudinal axis extending between the proximal end and the distal end, wherein the proximal end is coupled to the movable platform and the distal end can be actuated in a direction substantially normal to a surface of the substrate. A process comprising forming one or more anchors on a substrate; suspending a movable platform by one or more tether beams coupled to the one or more anchors; coupling an actuator to the movable platform; and coupling a micro-electro-mechanical (MEMS) probe to the movable platform, the MEMS probe having a proximal end, a distal end and a longitudinal axis extending between the proximal end and the distal end, wherein the proximal end is coupled to the movable platform and the distal end can be actuated in a direction substantially normal to a surface of the substrate.

REFERENCES:
patent: 6995368 (2006-02-01), Wen et al.
patent: 7176457 (2007-02-01), Wen et al.
patent: 2008/0148879 (2008-06-01), Chou

Affiliated with

Also associated with

Rating

Seek-scan probe (SSP) memory including mechanism for track... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Seek-scan probe (SSP) memory including mechanism for track..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Seek-scan probe (SSP) memory including mechanism for track... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4146288