Secondary electron detector for use in a gaseous atmosphere

Details Secondary electron detector for use in a gaseous atmosphere Secondary electron detector for use in a gaseous atmosphere

1988-11-10

1989-11-14

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37252

Patent

active

048809764

ABSTRACT:
The invention provides for a device for generating, amplifying and detecting secondary electrons from a surface of a sample. The device may comprise a scanning electron microscope. The invention also provides for a method for generating, amplifying and detecting secondary electrons from a surface of a sample.

REFERENCES:
patent: Re27005 (1970-12-01), Wingfield et al.
patent: 3612859 (1971-10-01), Schumacher
patent: 4596928 (1986-06-01), Danilatos
patent: 4720633 (1988-01-01), Nelson
patent: 4785182 (1988-11-01), Mancuso et al.
Danilatos, "A Gaseous Detector Device for an Environmental SEM", Micron and Microscopa Acta 14(4), pp. 307-318 (1983);
Danilatos, "Design and Construction of an Atmospheric or Environmental SEM", (Part 3), Scanning, vol. 7, 26-42 (1985).
Danilatos, G. D., "Improvements on the Gaseous Detector Device" G. D. Bailey, Ed. Proceedings of the 44th Annual Meeting of the Electron Microscopy of America, pp. 630-631, (1986).
Danilatos, G. D., "ESEM--A Multipurpose Surface Electron Microscope," G. W. Bailey, Ed., Proceedings of the 44th Annual Meeting of the Electron Microscopy Society of America, pp. 632-633 (1986).
Danilatos, G. D. et al., "Principles of Scanning Electron Microscopy at High Specimen Chamber Pressures," Scanning, vol. No. 2, 1979, pp. 72-82.

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