Secondary charged particle analyzing apparatus and secondary cha

Details Secondary charged particle analyzing apparatus and secondary cha Secondary charged particle analyzing apparatus and secondary cha

1990-03-12

1992-02-18

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 250309, 250305, 250310, H01J 3726

Patent

active

050896997

ABSTRACT:
In a secondary charged particle analyzing apparatus such as a secondary ion mass analyzing apparatus, a scanning type electron mass analyzer, etc., in order to obtain a high resolving power and a high sensitivity, trajectories of secondary charged particles are corrected by means of an accelerating lens formed in a secondary charged particle extracting section disposed within the apparatus.

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patent: 4107527 (1978-08-01), Cherepin et al.
patent: 4737639 (1988-04-01), Rusch
patent: 4740697 (1988-04-01), Suzuki
patent: 4758723 (1988-07-01), Wardell et al.
patent: 4785172 (1988-11-01), Kubena et al.
patent: 4810879 (1989-03-01), Walker

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