Sealing device

Details Sealing device Sealing device

1991-02-26

1992-07-28

Cuchlinski, Jr., William A.

Seal for a joint or juncture

Seal between relatively movable parts

Relatively rotatable radially extending sealing face member

277 27, 277 72R, 277 75, 277 79, 285 96, 285 97, F16J 1502, F16J 1548

Patent

active

051335611

ABSTRACT:
A sealing device of this invention is designed to prevent entering of the open air through a coupling of a process tube of a CVD apparatus. The sealing device includes a first flange having a mirror-finished face, a second flange having a face which is brought into contact with the face of the first flange, at least one gas guide which is open to at least one of the faces of the first and second flanges and an evacuation system for evacuating a region, in which the first and second flanges are brought into contact with each other, through the gas guide.

REFERENCES:
patent: 1826941 (1931-10-01), LaMont
patent: 1888026 (1932-11-01), Chapman
patent: 2987218 (1961-06-01), Erickson et al.
patent: 3144035 (1964-08-01), Hablanian
patent: 3645545 (1972-02-01), Garnache et al.
patent: 4406458 (1983-09-01), Maier
patent: 4450786 (1984-05-01), Doehler et al.
patent: 4544317 (1985-10-01), Carter
patent: 4626002 (1986-12-01), Hagemeister et al.
patent: 4726689 (1988-02-01), Pollock
patent: 4735421 (1988-04-01), Neef et al.
patent: 4799692 (1989-01-01), Batzer et al.
Design Parameters for Differentially Pumped Rotating Platforms, Rev. Sci. Instrum. 58(2), Feb. 1987.

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