4. Coating apparatus
  5. Gas or vapor deposition
  6. Chamber seal

Hiroshi Sekizuka

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Sealing apparatus

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Sealing device

Seal for a joint or juncture – Seal between relatively movable parts – Relatively rotatable radially extending sealing face member
Patent

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Profile ID: LFUS-PAI-P-159943

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