Sealed three dimensional metal bonded integrated circuits

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Assembly of plural semiconductive substrates each possessing...

Reexamination Certificate

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Details

C438S109000, C438S118000, C438S508000, C438S508000, C257S686000, C257S777000, C257SE21503, C257SE21705, C257SE25013

Reexamination Certificate

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10791492

ABSTRACT:
The invention provides a sealing layer that seals metal bonding structures between three dimensional bonded integrated circuits from a surrounding environment. A material may be applied to fill a volume between the bonded integrated circuits or seal the perimeter of the volume between the bonded integrated circuits. The material may be the same material as that used for underfilling the volume between the bottom integrated circuit and a substrate.

REFERENCES:
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patent: 5863970 (1999-01-01), Ghoshal et al.
patent: 6339254 (2002-01-01), Venkateshwaran et al.
patent: 6566745 (2003-05-01), Beyne et al.
patent: 6613606 (2003-09-01), Lee
patent: 6777268 (2004-08-01), Jiang
patent: 6820329 (2004-11-01), Fang
patent: 2002/0158318 (2002-10-01), Chen

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