Sealed line structure for use in process chamber

Details Sealed line structure for use in process chamber Sealed line structure for use in process chamber

2006-11-21

2006-11-21

Paik, Sang (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C392S416000

Reexamination Certificate

active

07138608

ABSTRACT:
A sealed line structure equipped with a heater block for a process chamber for use in manufacturing a semiconductor device is provided. The structure includes a housing member, a movement prevention member is constructed of a lock nut, a clamp ring and an elastic unit, and a power line or a thermocouple line is sealed by the configuration of the housing member, the movement prevention member, a cover member, and a connector member.

REFERENCES:
patent: 5562947 (1996-10-01), White et al.
patent: 5753891 (1998-05-01), Iwata et al.
patent: 5772773 (1998-06-01), Wytman
patent: 5935338 (1999-08-01), Lei et al.
patent: 6200634 (2001-03-01), Johnsgard et al.
patent: 6376808 (2002-04-01), Tachikawa et al.
patent: 6387185 (2002-05-01), Doering et al.
patent: 6669784 (2003-12-01), Futamura et al.

Affiliated with

Also associated with

Rating

Sealed line structure for use in process chamber does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Sealed line structure for use in process chamber, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Sealed line structure for use in process chamber will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3633646