Seal cartridge for a rotatable magnetron

Details Seal cartridge for a rotatable magnetron Seal cartridge for a rotatable magnetron

1994-08-25

1996-05-21

Nguyen, Nam

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20429821, 20429822, 20429823, 20429809, 20429828, C23C 1435

Patent

active

055185924

ABSTRACT:
In a rotatable magnetron, a seal cartridge having vacuum seals integrated therein provides a seal between a seal housing of the magnetron support assembly and a spindle carried therein. The seal cartridge is axially movable with respect to the magnetron support assembly which enables its efficient removal and replacement therefrom. As such removal and replacement of the cartridge automatically accomplishes the removal and replacement of the integral vacuum seals, no handling or reassembly of the vacuum seals is required. The seal cartridge of the present invention provides a protected seal design which improves seal integrity in rotatable magnetrons.

REFERENCES:
patent: 4445997 (1984-05-01), McKelvey
patent: 4446877 (1984-08-01), McKelvey
patent: 5096562 (1992-03-01), Boozenny et al.
patent: 5100527 (1992-03-01), Stevenson et al.
patent: 5200049 (1993-04-01), Stevenson et al.

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