Brushing – scrubbing – and general cleaning – Machines – Brushing
Reexamination Certificate
2005-06-14
2005-06-14
Warden, Sr., Robert J. (Department: 1744)
Brushing, scrubbing, and general cleaning
Machines
Brushing
C015S102000, C134S902000, C134S199000
Reexamination Certificate
active
06904637
ABSTRACT:
An apparatus for cleaning a substrate is provided. The apparatus comprises a plurality of rollers adapted to support a substrate in a vertical orientation, a scrubber brush adapted to contact a substrate supported by the plurality of rollers, and a sonic nozzle positioned at an elevation below the elevation of the scrubber brush and adapted so as to output a sonicated fluid spray that contacts a beveled edge or a major surface of the substrate such that fluid having sufficient sonic energy to harm the scrubber brush will not contact the scrubber brush.
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Applied Materials Inc.
Cole Laura C
Dugan & Dugan
Warden, Sr. Robert J.
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