Rotary expansible chamber devices – Heat exchange or non-working fluid lubricating or sealing – Valve regulated non-working fluid
Patent
1988-12-15
1991-01-15
Vrablik, John J.
Rotary expansible chamber devices
Heat exchange or non-working fluid lubricating or sealing
Valve regulated non-working fluid
418 97, 418 98, 418104, 4182011, 418DIG1, 277 3, 277 79, F04C 1816, F04C 2502, F04C 2700, F16J 15447
Patent
active
049849743
ABSTRACT:
The screw type vacuum pump comprises a pump casing having a suction inlet and a discharge outlet, and a pair of rotors incorporated within the pump casing and meshing with each other to rotate in synchronized manner. The vacuum pump evacuates a reaction vessel, to which process gas is applied, to obtain a negative pressure condition of a predetermined level. Upon operation of the pump, inert gas is introduced into a compression working chamber directly or through a sealing portion disposed adjacent the discharge outlet. The introduced inert gas is adiabatically compressed therein to generate heat to heat the rotors and a casing wall. Further the inert gas effects a reduction of partial pressure of the process gas in the pump. Accordingly, a side reaction product is prevented from accumulating on the rotors and the casing wall.
REFERENCES:
patent: 3307777 (1967-03-01), Schibbye
patent: 3375015 (1968-03-01), Swearingen
patent: 3919854 (1975-11-01), Denis
patent: 4268230 (1981-05-01), Bassan
patent: 4714418 (1987-12-01), Matsubara et al.
patent: 4781553 (1988-11-01), Nomura et al.
patent: 4808095 (1989-02-01), Nishitani et al.
Hayakawa Tadashi
Masujima Kiyoshi
Matsubara Katsumi
Naya Koutarou
Shiinoki Kazuaki
Hitachi , Ltd.
Vrablik John J.
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