Scintillator device and image pickup apparatus using the same

Details Scintillator device and image pickup apparatus using the same Scintillator device and image pickup apparatus using the same

1997-05-05

1999-08-03

Nguyen, Kiet T.

Radiant energy

With charged particle beam deflection or focussing

With detector

H01J 2920

Patent

active

059328800

ABSTRACT:
A scintillator device and an image pickup apparatus using the scintillator, in which the scintillator for converting an input particle or electron beam image into an optical image is applied with a voltage between electrodes formed at the input plane of the electron beam and the output plane of scintillation. This voltage generates an electric field in the scintillator so that scattering of a charged particle beam in the scintillator is prevented and the resolution and S/N ratio can be improved while retaining a large amount of scintillation. Accordingly, the shift amount of low energy charged particle beams from the incident axis, which greatly influences degradation of the resolution and S/N ratio, can be suppressed.

REFERENCES:
patent: 4195226 (1980-03-01), Robbins et al.
patent: 4363969 (1982-12-01), Ong
patent: 4398090 (1983-08-01), Eloy et al.
"Ultramicroscopy", vol. 52, 1993, pp. 7-20.
"Ultramicroscopy", vol. 54, 1994, pp. 293-300.

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