Scatter correction in reflectivity measurements

Details Scatter correction in reflectivity measurements Scatter correction in reflectivity measurements

1993-03-22

1995-09-19

Saadat, Mahshid D.

Optics: measuring and testing

Of light reflection

356326, 356381, 356448, G01N 2155, G01J 328

Patent

active

054520916

ABSTRACT:
The correction for scattered light reflected from a substrate having surface irregularities and the measurement of thin film thickness on that substrate are made using a spectrophotometer system and the Fresnel reflectance equation.

REFERENCES:
patent: 4350442 (1982-09-01), Arild et al.
patent: 4680084 (1987-07-01), Heimann et al.
patent: 4766551 (1988-08-01), Begley
patent: 4899055 (1990-02-01), Adams

Affiliated with

Also associated with

Rating

Scatter correction in reflectivity measurements does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scatter correction in reflectivity measurements, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scatter correction in reflectivity measurements will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1832628