Scanning tunneling microscope and surface topographic observatio

Details Scanning tunneling microscope and surface topographic observatio Scanning tunneling microscope and surface topographic observatio

1991-11-25

1992-11-10

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3726

Patent

active

051626535

ABSTRACT:
In a surface topographic observation method using a scanning tunneling microscope, a probe is moved away from the surface of a sample and is moved on a plane to successively move it to points of measurement on the surface of the sample in order to obtain texture information of the sample. That is, the probe is moved on a plane completely preventing the probe tip from colliding with the surface of the sample and enabling the probe to effect scanning at high speeds.

REFERENCES:
patent: 4841148 (1989-06-01), Lyding
patent: 4870352 (1989-09-01), Koechner
patent: 4894538 (1990-01-01), Iwatsuki et al.
patent: 4902892 (1990-02-01), Okayama et al.
patent: 5047637 (1991-09-01), Toda
patent: 5059793 (1991-10-01), Miyamoto et al.

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